ALD Precursor Delivery System
-- Semiconductor International, 4/1/2008
Mole Delivery Device (MDD) is an ALD precursor delivery and control technology developed to meet the demands of next-generation semiconductor logic and memory devices. It accurately delivers precursors for maximum process uniformity and repeatability using fundamental gas measurement principles and application-specific control valves. The MDD is able to precisely deliver liquids, as well as dissolved solid precursors and gases with low volatility, in discrete micromole doses from 10 to 500 μmoles as specified by the user. The precursor-on-demand delivery capability eliminates waste of expensive precursors, reducing process costs. In addition, the MDD offers e-diagnostics through an embedded Ethernet interface, which allows monitoring of performance parameters during operation. MKS Instruments, Andover, Mass., www.mksinst.com
