Single-Wafer Cleaning Tool
-- Semiconductor International, 1/1/2008
Cellesta is a 300 mm single-wafer cleaning tool for 45 nm and beyond. It has a 12-process spin chamber configuration, which enables a throughput of 333 wph. It also employs improved compact spin unit design and on-board chemical supply. Tokyo Electron Ltd. (TEL), Tokyo, www.tel.com
