Electro-Damp® PZT    
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SPACER
November 22, 2008
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Electro-Damp® PZT
Frame-Mountable Active Hard-Mount
With Extended Stroke
    
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Electro-Damp PZT

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Incorporating Patented Stacis® Technology

NEW FROM TMC!

General Specifications

 

 

 

 

Cost-effectively combines the best aspects of Stacis®active hard-mount         
and Electro-Damp¨active air-mount vibration isolation systems.          

Stacis<sup>®</sup>


Stacis®

Stacis®, first introduced in 1996, is the world's most advanced active vibration cancellation system. An active hard-mount, Stacis achieves extremely efficient vibration isolation using piezoelectric actuators and a stiff suspension. Electro-Damp®, first introduced nearly 20 years ago, was the first active, inertially damped, pneumatic vibration isolator. Electro-Damp® PZT combines the best features of these two technologies to provide a cost-effective, frame-mountable, stiff, yet extremely efficient, non-pneumatic vibration isolation system.


ElectroDamp II  

Electro-Damp® II

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Features

  • Incorporates patented Stacis® technology
  • Extended stroke piezoelectric actuators, up to 60 µm
  • Position repeatability of payload to within 20 µm
  • Frame-mountable design
  • 3 or 6 active degrees-of-freedom
  • Lightweight, easily installed
  • Available both with and without feedforward control
  • Active inertial vibration cancellation system
  • Fast settling time in response to stage motion
  • No soft air suspension
  • Simple, robust, and cost-effective

 

Electro-Damp PZT

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ElectrDamp PZT Screens
Electro-Damp PZT Installation
 
Electro-Damp® PZT is frame-mountable and ideal for semiconductor
applications equipment which imcorporate mororized XY stages.
General Specifications (may vary depending on configuration)
Power Supply  
Channels  8, 10A max peak
current/channel
Type PWM with RF output filtering
Power 700 W (total, all channels)
Cooling Forced air
Protection Over-current protection
Operation Remote or manual enable
Dimensions 2 RETMA rack unit
height x 15 in. deep
(1DC 2000, 1 Power Amplifier)
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        ElectroDamp PZT
DC-2000 Digital Controller Performance Specifications
Analog inputs/outputs 16 channels
(16/14 bit)
Digital inputs/outputs 16
Sampling rate 5 KHz nominal
Front panel Two-line LCD with soft
menu keys
BNC input and output
for signal monitoring
Two RS-232
communication ports
(second port on rear)
Tri-color system status lamp
Physical Single RETMA rack unit
height x 15 in. deep
Power 90-240 VAC, 50-60 Hz,
600 watts max.
Other Power connector for
support of external devices
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Active degrees of freedom 3 or 6
Active bandwidth 0.5 to 100 Hz
Natural frequency Passive elastomer:
15 Hz Vertically
5 Hz Horizontally
Transmissibility at resonance < 0.1
Settling time after a 10 lb (4.5 kg)
  step input (10:1 reduction)
0.1 sec
Internal noise <0.1 nm RMS
Operating load range per isolator
  (different passive mounts required)
Contact TMC
Number of isolators 3 or 4
Maximum displacement 2400 µ in. (60 µm)
Stiffness (1,000 lb/454 kg mass) 10,000 lb/in.
(18 x105 N/m)
Magnetic field emitted < 0.02 micro-gauss
broadband RMS
Dimensions, Environmental and Utility Requirements Linear Actuators (horizontal)
Isolator size see drawings
Isolator weight 17 lb. (8kg)
Temp. operating 50° to +90° F (10° to 32° C)
Humidity operating 68° F dewpoint (maximum)
Power required 100, 120, 230, 240 volts;
50/60 Hz; < 200 watts, CE compliant
Floor displacement < 2400 µ in. (60 µm) below 15 Hz.

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DC resistance 4.0 Ohms
Force constant 5 lb/Amp
Max. continuous force 10 lb
Peak force 20 lb
Electrical time const. 2.5 msec

How to Order.

Contact a TMC Applications Engingeer for part numbers and pricing.
 
 
 
 
 
 
 
 

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