Wafer Pre-Alignment
-- Semiconductor International, 1/1/2008
In-Sight 1820 is a vision-based wafer pre-aligner. It uses the company's NotchMax alignment technology to provide precise non-contact measurement of wafer position and orientation. It determines wafer position and orientation in less than half a second, and aligns wafers with a center positional accuracy of ±15 µm. It also has an orientation accuracy of ±0.05°. Cognex Corp. , Natick, Mass., www.cognex.com
