Wafer-Level Vibration Sensor
-- Semiconductor International, 2/1/2008
WaferSense Auto Vibration System (AVS) was designed to monitor three-axis accelerations and equipment vibration to optimize equipment motion and wafer throughput. It is a wireless, wafer-like accelerometer available in 200 or 300 mm format. It reports X, Y and Z acceleration, has a range of ±2 G, and can detect wafer slides, slips, bumps, scrapes and rough handling. CyberOptics Semiconductor, Beaverton, Ore., www.cyberopticssemi.com
