AL2100 - Wafer Inspection and Defect Review System

The most versatile tool for wafer inspection and defect review

"Our core expertise is at the heart of every AL2100"

The AL2100 combines the core optical expertise of Olympus with superb mechanical and ergonomic design. The result is a fully integrated, cost effective tool capable of Macro and Micro wafer inspection and defect review.

Process and yield engineers increasingly rely on a broad range of inspection routines to track defects and maximize yields. The AL2100 wafer inspection system combines the core optical expertise of Olympus with superb mechanical and ergonomic design. The result is a fully integrated, cost effective tool capable of Macro and Micro wafer inspection and defect review.

Olympus is world renown for superior microscopes with unsurpassed optical design and flawless mechanical operation. The AL2100 gives the operator a system that is optimized for ease of use and high productivity. Available with a full range of options, capabilities can be readily enhanced. Whether a simple photo/video/video capture capability is all that is needed, or that advanced imaging DIC unit and/or Ultra resolution/CF is essential, the AL2100 inspection system is adaptable.

Macro Inspection
Olympus' unique solution for front and back inspection

A simple, programmable interface allows the positioning of wafers on the automatic stage with a coordinate repeatability of less than 20 microns.

Advances in wafer processing technology, such as copper interconnects, have identified the need to inspect the backside of wafers for gross contamination. The Al2100 uniquely offers a variety of options for inspection of both the front and back of wafer surfaces in a single pass.

The macro inspection table is motorized and easily positioned with a responsive controller. During backside macro observation and precise tilt angle can be maintained while the wafer is rotating. This capability, along with a full complement of inspection light sources, satisfies the most demanding macro inspections.

Micro Inspection
Identifying killer process defects

Even the most advanced wafer fabs continue to rely on inspection system to perform time sensitive operations such as ADI (After Develop Inspect.) The AL2100 the tradition of excellence found in every Olympus product integrated into a tool built to meet these requirements. In addition to the transport and positioning of wafers for inspection, users can define exact operational menus for selection of specific product/process recipes, configure the inspection screen for display of wafer maps or display and store defect images.

Defect Review
Observe and classify defects quickly and easily

The review and classification of of defect detection is critical. The AL2100 allows the user to import defect maps from both patterned and bare wafer inspection tools quickly and observe defects under a wide range of magnifications and illumination conditions, including Bright Field, Dark Field, DIC, and Confocal. Upon completion of the classification process, defect maps are updated. Images are saved as required and exported to the yield management system for the wafer fab.

Related Information
Product Overview (English, 165KB, .pdf )