Spray Coating
-- Semiconductor International, 6/1/2008
A spray coating technology has been developed for thin-film photoresist applications on non-traditional wafers and MEMS devices. It uses a nozzle-less ultrasonic spray head and a high-performance X-Y-Z motion control platform when applying a thin, uniform coating of photoresist when spin coating is ineffective. Ultrasonic Systems Inc., Haverhill, Mass., www.ultraspray.com
