Swagelok® Diaphragm Valves for Atomic Layer Deposition (ALD)
Swagelok ALD diaphragm valves offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62, along with thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.

Specifications Working Pressure Burst Pressure Actuation Pressure Temperature Flow Coefficient Body Material Diaphragm Material End Connections • Type • Size

Vacuum to 145 psig (10.0 bar) >3200 psig (220 bar) 50 to 90 psig (3.5 to 6.2 bar) 32 to 392°F (0 to 200°C) 0.27 or 0.62 316L VIM-VAR stainless steel Elgiloy® VCR® face seal fitting, tube butt weld; modular surface mount (MSM) 1/4 to 1/2 in.; 6 to 12 mm; 1.125 and 1.5 in. MSM

More Information
Download the Diaphragm Valves for Atomic Layer Deposition (ALD) catalog.
Download the ALD3 Diaphragm Valves Technical Report.
Download the ALD6 Diaphragm Valves Technical Report.
Find atomic layer deposition valves in the product search.

More Ultrahigh-Purity Diaphragm Valves
High-flow, springless diaphragm valves—DF series
Springless diaphragm valves for high performance—DP series
Thermal-immersion diaphragm valves for high-temperature environments

Features

• Normally closed and normally open pneumatic actuation.
• Standard and thermal actuators
• Capable of valve opening or closing time of less than 5 ms
• Factory-seat flow adjusting mechanism for precise, consistent Cv
• Fully contained high-purity grade PFA seat offers broad range of chemical compatibility and excellent resistance to swelling and contamination
• Fully swept flow path:
• Minimizes entrapment areas
• Facilitates purging
• Maximizes flow capacity

Atomic Layer Deposition (ALD) DIaphragm Valve Process Specifications

• Ultrahigh-purity, process designator P: Ultrahigh-Purity Process Specification (SC-01)
• Ultrahigh-purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system
• Performed in ISO Class 4 work areas; valves are double bagged and vacuum sealed in cleanroom bags
• 5 µin. (0.13 µm) average wetted surface roughness, machine finished and electropolished.

Atomic Layer Deposition (ALD) Diaphragm Valve Testing

• ALD3 normally closed: Inboard helium leak tested to a rate of 1 × 10^–9 std cm³/s at the seat, envelope, and all seals.
• ALD3 and ALD6 normally open and ALD6 normally closed: Inboard helium leak tested to a rate of 1 × 10^–8 std cm³/s at the seat and to a rate of 1 × 10^–9 std cm³/s at the envelope and all other seals.

Configurations

• Two-port straight and elbow configurations
• Two-, three-, and four-port multiport valves and multivalve manifolds
• Two- and three-port modular surface mount in 1.125 in. (ALD3 series only) and 1.5 in platforms

Options

ALD Valve with Electronic Actuator-Position Sensor and Solenoid Pilot Valve