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Ultra-Clean Processing of Semiconductor Surfaces

Date: Sept. 21-24, 2008

Location: Brugge, Belgium

UCPSS examines ultraclean processing technology in all steps of IC production. The conference consists of invited presentations, as well as selected contributing presentations and posters.

Contributing authors should submit a two-page abstract for evaluation on or before Monday, March 31, 2008. Accepted manuscripts will be published in the conference proceedings.

www.ucpss.org

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