Wafer Inspection Module
-- Semiconductor International, 6/1/2008
MX2000IR is a wafer inspection system with automatic robotic handling. For 150 and 200 mm wafers, 1-4 cassettes holding up to 25 wafers each can be automatically loaded. For 300 mm wafers, FOUP stations are available, so the robot takes the wafer directly from the station. Wafer identification and pre-alignment are performed in parallel with inspection. Viscom Inc., Hanover, Germany, www.viscom.com
