XRF Film/Composition Tool
-- Semiconductor International, 6/1/2008
The SMX X-ray fluorescence (XRF) is a tool portfolio for film thickness and composition measurement of CIGS and CdTe photovoltaic films. It has four tools, including a benchtop system, full-panel analysis system, inline system and in situ system. The SMX XRF uses a common XRF engine that is adapted to optimal insertion points, allowing for a common system GUI and consistency/reproducibility between SMX XRF tools. Solar Metrology, Holbrook, N.Y., www.solarmetrology.com
