UpTime® Sub-Atmospheric Delivery System

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Ion Implant / UpTime® Systems

Description

Process Control & Performance Benefits

Safety Features

The UpTime® sub-atmospheric delivery dopant gas package is designed for use in ion implanters. The UpTime system offers the highest product capacity, high product purity and low cost of ownership.

The system is comprised of an internal vacuum actuated check valve, in series with a specially designed capillary flow restrictor. The UpTime system is designed for safety with two different types of safeguards, a mechanical actuator and flow restrictor.

The UpTime product family includes:

	»	Arsine
	»	Enriched ⁷²Germanium Tetrafluoride
	»	Germanium Tetrafluoride
	»	High Capacity Isotopically Enriched Boron Trifluoride
	»	Isotopically Enriched Boron Trifluoride
	»	Phosphine
	»	Silicon Tetrafluoride
Custom in-situ cleaning mixtures are available as well as additional ultra-high purity gases upon request.

Feature Focus: High-Capacity Isotopically Enriched Boron Trifluoride for Ion Implantation
	The high-capacity UpTime sub-atmospheric B¹¹F₃ dopant gas delivery system is designed as an alternative to the existing sub-atmospheric technologies used in ion implanters. In comparison to these technologies, the high-capacity UpTime system offers the industry's highest product capacity, high product purity and lowest total cost of ownership. More