EV Group, EVG520IS Semi-Automated Wafer Bonding System
The EVG520IS single-chamber unit handles wafers up to 200 mm with semi-automated operation for small volume production applications. Redesigned based on customer...
FSI International, Inc., MAGELLAN® Immersion Cleaning System
The MAGELLAN® Immersion Cleaning System is a 200/300mm bridge tool which offers unparalleled process performance & configurability. Contributing to its industry-leading...