Microcontamination Inspection Service
-- Semiconductor International, 6/15/2008
The CollectTorr is an in situ sampling system for optics purge gas certification. The advanced lithography and inspection/metrology tool is accompanied by an offline analytical service from the company with ppt-level assessment of molecular acids, bases, refractory and organic contaminants. The system can include contamination root-cause analysis upon request. SAES Pure Gas Inc., San Luis, Calif., www.puregastechnologies.com Booth 2215-South
