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MetaPULSE-IIIa System

The MetaPULSE-IIIa™ thin film metrology tool offers high throughput and low cost-of-ownership for film thickness measurements in aluminum applications. PULSE Technology™ provides high-volume, on-product thickness and material characterization for opaque (metal) films over a broad range of types, dimensions and multilayered configurations. The MetaPULSE-IIIa delivers up to 25 percent greater throughput than previous generations.

 

For more information about the MetaPULSE-IIIa System, please contact us.

Overview

  • The trusted technology for on-product measurements
  • Small spot size and high magnification optics increase accuracy
  • Operates on the common Rudolph automation platform
  • Ideal for DRAM and flash memory manufacturing for 80, 65, 45, and 32 nm devices
  • Matching and recipe compatibility with previous MetaPULSE generations